About: http://webisa.webdatacommons.org/352324607

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, processes for producing and/or assembling the layers include, but are not limited to, microfluics application processes, or chemical vapor deposition for forming a mask, and followed by a process such as etching.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com