About: http://webisa.webdatacommons.org/352325048

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	of the substrate made of a metal or an alloy has been exemplified as the supporting substrate 1, while a substrate made of an insulator such as silicon wafer, glass, ceramic, or resin may be used as the supporting substrate 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com