About: http://webisa.webdatacommons.org/352438867

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, one of the important problems to be solved of the low-temperature poly-Si TFT is the improvement in quality of a gate insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com