| http://www.w3.org/ns/prov#value | - For instance, the substrate may be made of glass, ceramics such as alumina (Al2O3), forsterite (2MgO.SiO2), steatite (MgO.SiO2), mullite (3Al2O3.2SiO2), beryllia (BeO), aluminum nitride (AlN), silicon nitride (SiN), and silicon carbide (SiC+BeO), and heat-resistant glass materials such as crystallized glass.
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