About: http://webisa.webdatacommons.org/352683850

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Parameters such as spot size, angle of incidence, laser fluence, laser pulse energy, laser wavelength, distance from target to substrate, etc., can vary from the disclosed embodiments.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com