About: http://webisa.webdatacommons.org/352996874

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In FIG. 1, it is to be understood that the surface to be inspected of a photomask such as a mask or a reticle spreads over the x-y plane of a rectangular coordinates system xyz.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com