About: http://webisa.webdatacommons.org/35320393

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This curvature also depends upon numerous parameters of the micro-mirror, including the parameters ???a??? and ???b??? and the thicknesses and materials used for the layers 10 to 16 of the membrane 8.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com