About: http://webisa.webdatacommons.org/353328122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9, covering three pages, is a flow chart indicating the sequence of operation of the system of this invention as a wafer travels from the first processing station to the first storage unit;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com