About: http://webisa.webdatacommons.org/353372228

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the protective films 2005, 2006, it is possible to use an inorganic insulating film such as silicon oxide, silicon nitride, silicon nitride oxide, an insulating film such as siloxane series, and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com