About: http://webisa.webdatacommons.org/353397635

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIGS. 4 to 6, metal such as copper (Cu) is filled into the grooves 43 by a metal plating method, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com