About: http://webisa.webdatacommons.org/353514837

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A gate insulating layer 140 including inorganic insulating material such as silicon oxide (SiO2) or silicon nitride (SiNx), for example, is formed on the substrate 110.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com