About: http://webisa.webdatacommons.org/353824627

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	More specifically, the detection signal level from the circuit pattern is reduced, resulting in an increase in an area where the defect such as the foreign material can be detected with high sensitivity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es