About: http://webisa.webdatacommons.org/353890894

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the low k dielectric material may be an organic material, such as benzocyclobutene (BCB), SILK, FLARE, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com