About: http://webisa.webdatacommons.org/3539664

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate according to claim 1, wherein the thin layer is a conductive material which is a metal or doped metal oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com