About: http://webisa.webdatacommons.org/354325401

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, the pressure in the processing container is 1 to 200 Pa, preferably 1 to 100 Pa, and one or more kinds of rare gases such as helium, argon, xenon, and krypton are introduced as a plasma ignition gas.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com