About: http://webisa.webdatacommons.org/3543553

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	subjecting the unprotected portion of photoresist to a medium for development of the photoresist, selected from a group including ultraviolet light, deep ultraviolet light, electron beams and x-rays; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com