About: http://webisa.webdatacommons.org/35448789

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It should be noted that the resist utilized can be water soluble, halogenated or other types of solvents can be used and which were not usable by the prior art processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au