About: http://webisa.webdatacommons.org/35465036

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	techniques, such as chemical vapor deposition, DC and RF magnetron sputtering, electron
http://www.w3.org/ns/prov#wasQuotedFrom	nanoscalereslett.com