About: http://webisa.webdatacommons.org/355189803

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, since the film mainly containing aluminum is used as the shielding film 3168, an aluminum oxide film (alumina film) is formed as the anodic oxide 3169.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com