About: http://webisa.webdatacommons.org/355317217

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment, the cavities can be formed such that the first cavity 206 may be a via, the second cavity 208 may be a trench including a second via 209 at the bottom.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com