About: http://webisa.webdatacommons.org/355353786

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In general the contact level aperture 1510 can be filled with a metal, such as copper (Cu), nickel (Ni), cobalt (Co), ruthenium (Ru), tungsten (W) or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com