About: http://webisa.webdatacommons.org/355364667

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the other hand, comb-electrode 102 and electrode pads 103 of metal thin film made mainly of gold are formed by using a conventional photolithographic (lift-off) method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es