About: http://webisa.webdatacommons.org/355403137

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the substrate is a semiconductor substrate 12 made of a semiconductor material, such as gallium arsenide (GaAs), gallium nitride (GaN), or silicon (Si).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com