About: http://webisa.webdatacommons.org/355954820

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As described above, the sheet resistance of the gate electrode silicided by using a Co film is influenced by various factors, such as the thermal processing temperature, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com