About: http://webisa.webdatacommons.org/35643946

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate portions (as in FIG. 1) can be, for example, silicon or another micromachined substrate or combination of micromachined substrates such as silicon and PYREX??? glass, e.g., as described in U.S. patent application Ser.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca