About: http://webisa.webdatacommons.org/356714249

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIG. 5B, after removing the PSG film using wet etching with a chemical such as HF, a node dielectric film 7 is formed on the side walls and bottom wall of the trenches.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com