About: http://webisa.webdatacommons.org/357147647

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Applications include extreme operating conditions, pumping oxygen or other oxidants, photo-resist stripping, LPCVD, plasma etching, and reactive ion etching
http://www.w3.org/ns/prov#wasQuotedFrom	lesker.com