About: http://webisa.webdatacommons.org/357210764

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conditions such as sputtering power, gas pressure, or substrate temperature may be suitably controlled by the operator.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com