About: http://webisa.webdatacommons.org/357326083

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	To acheive the objects and in accordance with the purposes of the invention, as embodied and broadly described herein, a method is provided for fabricating a semiconductor device including the steps of:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com