About: http://webisa.webdatacommons.org/357520639

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, for example, impurities such as carbon and chlorine originating from titanium precursors in such chemical vapor deposition processes may cause undesirable influence on the TiO2 film properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au