About: http://webisa.webdatacommons.org/357527198

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Containing microscopic moving parts such as gears, springs and valves, MEMS devices power some of our greatest gadgets ??? video game controllers, smartphones and navigation systems, to name just a few.
http://www.w3.org/ns/prov#wasQuotedFrom	appliedmaterials.com