| http://www.w3.org/ns/prov#value | - Such an attachment can be performed by depositing a film such as silicon nitride, SiO2 or the like with a thickness preferablylarger than half of the gap height between the SiGe bar 7 and the BOX 2.A key point in the exemplary embodiment is that the SiGe bar 7 being attached to the substrate is fully relaxed.
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