About: http://webisa.webdatacommons.org/357807625

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, an inter-layer insulating film 4 is formed generally to a thickness of 2000 angstroms to 5000 angstroms by using a material such as Si3 N4, SiON or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com