About: http://webisa.webdatacommons.org/358043853

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, trenches 104 are patterned by a method such as reactive ion etching (RIE).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com