About: http://webisa.webdatacommons.org/358200581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor device structures, such as gate electrodes 14 and source and drain regions 16 have been formed in and on the surface of a semiconductor substrate 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com