About: http://webisa.webdatacommons.org/358211719

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	elements can comprise evaporative deposition, sputtering, ion plating, etc, or chemical techniques such as CVD, plasma discharge or other such methods can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com