About: http://webisa.webdatacommons.org/358218241

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Mechanical properties such as hardness, modulus, and intrinsic stress decreased with increasing Si and H content in the films, for Si/C greater than or equal 0.04.
http://www.w3.org/ns/prov#wasQuotedFrom	duke.edu