About: http://webisa.webdatacommons.org/358375729

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A production control apparatus according to claim 2 wherein said workpiece is a wafer and said working device is equipment for semiconductor fabrication.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com