About: http://webisa.webdatacommons.org/358378967

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A process according to claim 1, wherein said second insulating film is a silicon oxide film or silicon nitride film, formed by chemical vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com