About: http://webisa.webdatacommons.org/358656581

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7a is a side view of the deposition device before loading the deposition material on it.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr