About: http://webisa.webdatacommons.org/358763286

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the object to be tested may be an LCD substrate or the like, other than the semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com