About: http://webisa.webdatacommons.org/359632726

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Regarding the coating by a vapor phase method, physical vapor deposition, such as sputtering, or a chemical vapor deposition, such as plasma CVD, can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com