About: http://webisa.webdatacommons.org/359793642

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Let it be assumed that substrates such as silicon wafers are mounted on the racks by use of the spring clips to assume positions such as that shown in FIG. 9.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com