About: http://webisa.webdatacommons.org/360042798

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In an embodiment, lower insulator layer 208 is a oxide, a fluorinated oxide, or an aerogel.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com