About: http://webisa.webdatacommons.org/360202430

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, it is determined whether to heat or to cool the high-frequency electrode 1114 as appropriate according to the deposited film material and deposition conditions.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com