About: http://webisa.webdatacommons.org/36022967

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another principal aspect, the present invention is a method of manufacturing an electromechanical device having a mechanical structure that resides in a chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com