About: http://webisa.webdatacommons.org/360230700

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the technologies of the above articles, since the semiconductor substrate is removed by polishing, there is a problem that a holding substrate of a rigid body is required.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es