About: http://webisa.webdatacommons.org/360312621

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	And in any case, such film forming material contains one or more kinds of factors capable of directly contributing to the formation of an objective functional deposited film.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com