| http://www.w3.org/ns/prov#value | - In this invention, however, stable glow discharge at the atmospheric pressure is possible by providing the solid dielectrics (14a) and (14b) on the surface of the upper electrode (12) and lower electrode (13) respectively as shown in FIG. 2, even though the substrate (15) is metal, alloy or a conductive material such as silicon.
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