About: http://webisa.webdatacommons.org/36039013

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In creating a microscopic MEMS pressure sensor, for example, engineers employ the same kinds of masks and etching compounds used in the production of silicon chips.
http://www.w3.org/ns/prov#wasQuotedFrom	nytimes.com